JAMES ALLEN <br/><br/>
MICRO ELECTRO MECHANICAL SYSTEM DESIGN 

 -  CRC PRESS  2005 
 - 465 
<br/><br/><label>ISBN: </label>9780824758240 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MECHANICAL ENGINEERING
<br/><br/><label>Dewey Class. No.: </label>621 P5 ALL