TY  - BOOK
AU  - MOHAMED GAD`EL`HAK
TI  - THE MEMS HANDBOOKOK MEMS DESIGN AND FABRICATION (3 VOL SET)
SN  - 9780849391385
U1  - 621.381 P6 HAK 
PY  - 2006///
PB  - CRC PRESS
KW  - ELECTRONICS [Optoelectronics]
ER  -