CHANG LIU <br/><br/>
FOUNDATIONS OF MEMS 

 - 2 
 -  PEARSON EDUCATION  2012 
 - 576 
<br/><br/><label>ISBN: </label>9788131764756 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRICAL ENGINEERING
<br/><br/><label>Dewey Class. No.: </label>621.3 Q2 LIU