TY  - BOOK
AU  - TAI - RAN HSU
TI  - MEMS & MICROSYSTEMS DESIGN AND MANUFACTURE
SN  - 9780070487093
U1  - 621.381 P2 HSU 
PY  - 2002///
PB  - MCRAW HILL EDUCATUIN (INDIA) PVT. LTD.
KW  - ELECTRONICS [Optoelectronics]
ER  -