TY  - BOOK
AU  - TAI-RAN HSU
TI  - MEMS & MICROSYSTEMS DESIGN AND MANUFACTURE
SN  - 9780070487093
U1  - 621.381 P2 HSU 
PY  - 2002///
PB  - MCGRAW HILL EDUCATION (INDIA) PRIVATE LIMITED
KW  - ELECTRONICS [Optoelectronics]
ER  -