TY  - BOOK
AU  - Thomas M. Adams, Richard A. Layton
TI  - Introductory MEMS
SN  - 9780387095110
PY  - 2010///
PB  - Springer eBooks
UR  - http://link.springer.com/openurl?genre=book&isbn=978-0-387-09511-0
ER  -