000 | 00389nam a2200169Ia 4500 | ||
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008 | 211104s9999 xx 000 0 und d | ||
020 | _a9788131764756 | ||
041 | _aENGLISH | ||
082 | _a621.3 Q2 LIU | ||
100 | _aCHANG LIU | ||
245 | 0 | _aFOUNDATIONS OF MEMS | |
250 | _a2 | ||
260 |
_c2012 _bPEARSON EDUCATION |
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300 | _a576 | ||
650 | _aELECTRICAL ENGINEERING | ||
942 | _cBK | ||
999 |
_c14790 _d14790 |