000 00389nam a2200169Ia 4500
008 211104s9999 xx 000 0 und d
020 _a9788131764756
041 _aENGLISH
082 _a621.3 Q2 LIU
100 _aCHANG LIU
245 0 _aFOUNDATIONS OF MEMS
250 _a2
260 _c2012
_bPEARSON EDUCATION
300 _a576
650 _aELECTRICAL ENGINEERING
942 _cBK
999 _c14790
_d14790