000 | 00403nam a2200157Ia 4500 | ||
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008 | 211104s9999 xx 000 0 und d | ||
020 | _a9788132206637 | ||
041 | _aENGLISH | ||
082 | _a621.381 Q0 ADA | ||
100 | _aTHOMAS M ADAMS | ||
245 | 0 | _aINTRODUCTORY MEMS FABRICATION AND APPLICATIONS | |
260 |
_c2010 _bSPRINGER |
||
300 | _a444 | ||
650 | _aELECTRONICS [Optoelectronics] | ||
942 | _cBK | ||
999 |
_c16157 _d16157 |