000 | 00440nam a2200169Ia 4500 | ||
---|---|---|---|
008 | 211104s9999 xx 000 0 und d | ||
020 | _a9780849391385 | ||
041 | _aENGLISH | ||
082 | _a621.381 P6 HAK | ||
100 | _aMOHAMED GAD`EL`HAK | ||
245 | 4 | _aTHE MEMS HANDBOOKOK MEMS DESIGN AND FABRICATION (3 VOL SET) | |
250 | _a2 | ||
260 |
_c2006 _bCRC PRESS |
||
300 | _a1419 | ||
650 | _aELECTRONICS [Optoelectronics] | ||
942 | _cBK | ||
999 |
_c18038 _d18038 |