000 00429nam a2200169Ia 4500
008 211104s9999 xx 000 0 und d
020 _a9780849391378
041 _aENGLISH
082 _a621.381 P6 HAK
100 _aMOHAMEDGAD`EL`HAK
245 4 _aTHE MEMS HANDBOOKOK MEMS APPLICATIONS (3 VOL SET)
250 _a2
260 _c2006
_bCRC PRESS
300 _a1635
650 _aELECTRONICS [Optoelectronics]
942 _cBK
999 _c18039
_d18039