000 00433nam a2200157Ia 4500
008 211104s9999 xx 000 0 und d
020 _a9780070487093
041 _aENGLISH
082 _a621.381 P2 HSU
100 _aTAI-RAN HSU
245 0 _aMEMS & MICROSYSTEMS DESIGN AND MANUFACTURE
260 _c2002
_bMCGRAW HILL EDUCATION (INDIA) PRIVATE LIMITED
300 _a436
650 _aELECTRONICS [Optoelectronics]
942 _cBK
999 _c20605
_d20605