| 000 | 00387nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 211112s9999 xx 000 0 und d | ||
| 020 | _a9780387095110 | ||
| 041 | _aEnglish | ||
| 100 | _aThomas M. Adams, Richard A. Layton | ||
| 245 | 0 | _aIntroductory MEMS | |
| 260 |
_c2010 _bSpringer eBooks |
||
| 856 | _uhttp://link.springer.com/openurl?genre=book&isbn=978-0-387-09511-0 | ||
| 942 | _cEB | ||
| 999 |
_c22136 _d22136 |
||